Selective SiGe Nanostructures PDF Download. Download free ebook of Selective SiGe Nanostructures in PDF format or read online by Thomas Andrew Langdo Published on 2001 by
(Cont.) By a combination of interferometric lithography Si/SiO2 substrate patterning and Ge selective epitaxial growth, we have demonstrated threading dislocation blocking at the oxide sidewall which shows promise for dislocation filtering and the fabrication of low defect density Ge on Si for III-V device integration. Defects at the Ge film surface only arise at the merging of epitaxial lateral overgrowth (ELO) fronts from neighboring holes. These results confirm that epitaxial necking can be used to reduce threading dislocation density in any lattice-mismatched systems where dislocations are not parallel to growth directions. Investigation of Ge selective growth in micron-sized SiO2 features by plan-view TEM shows that substrate patterning on the order of microns is insufficient to filter dislocations in a large mismatch system ([epsilon]\u003e 2%). Ge p-i-n photodetectors were selectively grown in micron-sized SiO2/Si features to correlate materials properties with electrical characteristics. For chemical protection and compatibility with Si microelectronics, Ge photodetector regions were capped with a thin n+ Si layer. Photodetectors fabricated on unpatterned substrates demonstrated leakage currents comparable to published results on Ge on Si photodetectors while leakage currents were noticeably degraded in devices grown on patterned substrates.
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